| Record type [005]: | S |
| Description level [006]: | s |
| Institutuion code [010]: | Catalis |
| Related data bases [040]: | CARPC^c3577 |
| TITLE [100]: | IEEE transactions on semiconductor manufacturing : |
| Subtitle [110]: | a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council. |
| Abbreviated title [150]: | IEEE trans. semicond. manuf |
| Added title [240]: | Institute of Electrical and Electronics Engineers transactions on semiconductor manufacturingTransactions on semiconductor manufacturingSemiconductor manufacturing |
| Start date [301]: | Vol. 1, no. 1 (1988)- . |
| Country of publication code [310]: | ?? |
| Publication level [330]: | CT |
| Alphabet of original title [340]: | a |
| Language of publication [350]: | EN |
| Frequency [380]: | u |
| Current ISSN [400]: | 0894-6507 |
| Publisher [480]: | Institute of Electrical and Electronics Engineers |
| Place of publication [490]: | New York |
| Record creation date [940]: | 20240429 |
| Record modification date [941]: | 20240429 |